Abstract
Using purified β-diketonate complexes of copper and alkaline earth metals as well as triphenyl bismuth as source gases, Ca 2 CuO 3 , SrCuO 2 and c -axis oriented Bi 2 Sr 2 CuO x and Bi 2 Sr 2 CaCu 2 O x films have been prepared under UV irradiation at temperatures of 500°C and below. UV irradiation has been proved to be effective for the preferential formation of complex oxides rather than carbonates as well as for the improvement of film crystallinity. The temperature dependence of resistivity and morphology of the obtained films are also investigated.
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