Abstract
Low temperature processing of sol-gel spin coated ferroelectric Pb(Zr0.52Ti0.48)TiO3 (PZT) thin film and sputtered (La 0.7 Sr 0.3 )MnO 3 (LSMO) buffer layer on Cr/SiO2/Si and SUS430 substrates using a continuous wave CO2 laser annealing technique was studied in the present work. The laser annealed PZT films coated on LSMO/Cr/SiO2/Si substrates shows an enhancement in the remanent polarization from 6.22 to 11.94 μC/cm2 as the PZT irradiated with a laser fluence of 267 to 334 W/cm2. The Cr electrodes were oxidized easily which deteriorate the electrical properties of specimens, even upon using CO2 laser annealing. On the other hand, the LSMO films (0.2 μm) sputtered on SUS430 substrate and spin coated PZT thin films (0.2 μm) were laser annealed sequentially, showed remanent polarization from 18.07 to 24.01 μC/cm2. CO2 laser annealing not only improves ferroelectric properties and electric leakage currents of PZT films, but also diminishes the inter-diffusion of elements in electrode and ferroelectrics. Moreover, laser annealing reduces oxidation of SUS430 and enhances the electrical performance of materials.
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