Abstract
Low temperature thin film spinel, with , are fabricated for use in secondary batteries. The spinel crystal structure is obtained by in situ postdeposition annealing of the films at temperatures as low as 400°C. Such temperatures are compatible with semiconductor processing, permitting future integration of the batteries with electronics. 1–3 μm thin films are tested in arrangements. They intercalate nearly one Li+ ion at an average potential of 4.1 V and show very good intercalation kinetics, so that a 10 C discharge rate produces an energy density of 500 W‐h per kilogram of active cathode material. These films show very promising cycle life, even at 55°C. Films cycled more than 220 times maintain more than 70% of their original capacity.
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