Abstract
The results of microstructural and tribological studies performed on sputterdeposited coatings of ZrO2 20Y2O3, TiB2, and B18 wt pct Si are reported. In each case, deposition parameters were identified that offered good tribological properties while maintaining low deposition temperatures (< 400 °C) to avoid distortion and softening of prior heattreated substrates. Zirconia deposits were prepared with a pronounced columnar microstructure that provided excellent thermal fatigue and wear resistance, making them candidates for heat engine applications. The TiB2 coatings were the hardest coatings prepared. These provided good wear resistance on steel substrates. The BSi coating displayed excellent wear resistance and good adherence to Cu and Al alloys.
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