Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/Oz-plasma 3 Hiroaki Tamamaki, Masaya Nomura, Keiichiro Sano (Suzuki Motor Corp.), Yoichiro Nakanishi, Yoshinori Hatanaka (Shizuoka University Research Institute of Electronics)

doi:10.1016/s0389-4304(97)85165-x

Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/Oz-plasma 3 Hiroaki Tamamaki, Masaya Nomura, Keiichiro Sano (Suzuki Motor Corp.), Yoichiro Nakanishi, Yoshinori Hatanaka (Shizuoka University Research Institute of Electronics)

https://doi.org/10.1016/s0389-4304(97)85165-x

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Journal: Review of Automotive Engineering

Publication Date: Apr 1, 1997

#Deposition Of SiO2 Thin Films #Suzuki Motor + Show 8 more

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Abstract

Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/Oz-plasma 3 Hiroaki Tamamaki, Masaya Nomura, Keiichiro Sano (Suzuki Motor Corp.), Yoichiro Nakanishi, Yoshinori Hatanaka (Shizuoka University Research Institute of Electronics)

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