Abstract
9539950 Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/O2-plasma 1 Keiichiro Sano (Shizuoka University Graduate School·Suzuki Motor Corporation), Shigekazu Hayashi, Masaya Nomura (Suzuki Motor Corporation), Sunil Wickramanayaka, Yoichiro Nakanishi, Yoshinóri Hatanaka (Shizuoka University Research Institute of Electronics)
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