Low-temperature Deposited Highly Sensitive Integrated All-Solid Electrodes for Electrochemical pH Detection

Abstract

This article describes the process of fabricating an integrated all-solid electrode (IASE) by integrating thin films of titanium dioxide (TiO<i>2</i>) and silver/silver chloride (Ag/AgCl) onto an indium tin oxide (ITO) substrate. The fabrication of a pH sensing electrode (SE) involved utilizing a spin-coated thin film composed of TiO<i>2</i>. Thermally produced thin films of Ag/AgCl were used to develop solid reference electrodes (RE). The present work examined the impact of the drying process on the pH sensitivity and linearity of the low-temperature deposited IASE. The drying procedure was carried out within a temperature range from room temperature to 100°C. The investigation involved the examination of crystallinity, surface morphology, and thin film composition through the utilization of field effect scanning electron microscopy (FESEM), X-ray diffraction (XRD), and energy-dispersive X-ray (EDX) methods. In addition, a comparison was made between the pH sensing performance of the IASE and a commercially available Ag/AgCl RE. The findings of this research demonstrate that the IASE sample, which underwent a drying process at a temperature of 100°C, exhibited remarkable sensitivity and linearity values of 66.7 mV/pH and 0.9827, separately, when compared to the commercially available RE.