Abstract
TiO2 gel films were deposited on self-assembled monolayers (SAMs) of octadecy ltrichlorosilane (OTS) and SiO2 glass substrates using Ti(OC3H7 i )4-derived titania sols. It was found that OTS SAM induces precipitation of anatase phase at a rather low temperature of 200°C when a molar ratio of H2O/Ti(OC3H7 i )4 was as low as 0.5 for sol preparation.
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