Abstract

Abstract The 1,000 ppm VOCs (volatile organic compounds) decomposition performance of SPCP (Surfaced Discharge Induced Plasma Chemical Processing) was studied relating to various carrier gas effects, plasma exposing methods and others in order to understand the decomposition mechanisms. In any carrier gas, a direct SPCP can decompose every VOC tested. The efficient decomposing carrier gases are oxygen, air and nitrogen in that order. However, when the SPCP treated gasses (air, nitrogen or oxygen) are mixed with contaminated gasses, oxygen seems be necessary to decompose VOCs. Four new halogenated (chloro-)organic materials are also tested as contaminants. The maximum decomposition for every contaminants is found to be more than 90% and the energy efficiency for each contaminant is roughly in the same order.

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