Abstract
AbstractIn this paper, we present our recent results on nickel germanosilicide contacts formed on p+-n and n+-p junctions formed by selective deposition of in-situ doped Si1-xGexalloys. Our results show that ultra-thin, low resistivity NiSi1-xGexcontacts can be formed at temperatures as low as 300°C on both boron and phosphorus doped Si1-xGexlayers. Ultra-shallow junctions with excellent reverse leakage behavior and a contact resistivity ∼ of 10-8ohm-cm2were successfully demonstrated. The thermal stability of NiSi1-xGexwas found to be limited to 500°C on p+-Si1-xGexand 600°C onn+-Si1-xGex. It was found that by inserting a thin Pt interlayer between Ni and Si1-xGex, the quality of the NiSi1-xGexcontacts could be significantly improved. The Pt interlayer was found to improve the interface morphology, which was found to have a direct impact on the electrical properties of the contacts.
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