Abstract
High-T c superconducting YBa 2Cu 3O 7−δ films have been prepared by low-pressure organometallic chemical vapor deposition using Cu(acetylacetonate) 2, Y(dipivaloylmethanate) 3, and Ba(dipivaloylmethanate) 2 as volatile metal-organic precursors. An argon carrier gas is employed and water vapor serves as the reactant. Film growth rates of 10–30 nm min -1 are achieved at a system pressure of 5 torr. After annealing under oxygen, the YBa 2Cu 3O 7−δ films deposited on SrTiO 3 exhibit excellent compositional and structural uniformity in addition to preferential orientation of crystalline c axes perpendicular to the SrTiO 3 surface. The onset of superconductivity is at ca. 90 K and zero resistance is achieved by 47 K.
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