Abstract
We report our investigations on a planar (Ø 125 mm) high-current (up to 50 А) pulsed (100–400 μs) magnetron discharge with injection and acceleration of auxiliary electrons into the cathode layer. The injected electrons were from the plasma of a pulsed (300 μs) vacuum-arc discharge with current amplitude 10–60 A. The magnetron targets were Cu and Zn, and the operating gas was argon. The use of a gasless vacuum-arc electron emitter leads to further decrease in the minimum operating pressure of the high-current form of magnetron discharge, down to 0.18 mTorr (0.024 Pa). We present here the experimental results and a numerical model of the evolution of the ion mass-to-charge composition of the magnetron plasma as the operating pressure decrease to its ultimate lower limit.
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