Abstract
H2 and NH3 detection with low power consumption was demonstrated by integrated chemiresistive Pt and PtRh nanosheet sensors on glass substrates. The self-heating effects realized low power and local heating of metal nanosheet sensors, enabling the integration of sensors with different operating temperatures. Based on different resistance changes in Pt and PtRh nanosheets toward H2 and NH3, the concentration of each gas was detected from a gas mixture by consuming around 1-mW power. For decreasing the power consumption and further integration of sensors, sensor scaling and pulsed operations were numerically and experimentally studied. In addition to good connectivity of metal nanosheet sensors to large-scale integration (LSI) circuits, improvements of the power consumption by sensor scaling were proven. The pulsed operations required for integrated sensor arrays maintained a sensor response, or a resistance change, of approximately 60%, even when the power consumption was reduced by 20%.
Highlights
I N THE Internet of things (IoT) era, gas sensors play an important role in edge devices
For the sensor responses to 50 ppm H2, the signal-to-noise ratios of the Pt the PtRh nanosheet sensors were 85 and 12, respectively
The high input power requirement of the PtRh nanosheet sensors means that the PtRh nanosheet sensors require a high temperature
Summary
I N THE Internet of things (IoT) era, gas sensors play an important role in edge devices. Densely integrated gas sensor arrays operating with low power consumption are not sufficiently developed. Thermal energy is required for acceleration of chemical reactions which generate sensor responses, and optimum operating temperatures depend on target gases and sensor materials. The heated surroundings disturb the integration of gas sensors with different optimum operating temperatures. For further suppression of power consumption and integration of the metal nanosheet sensors, scaling of sensor sizes and pulsed operations were experimentally and numerically studied. Toward practical application, sensor responses were measured during long-time self-heating operation. These newly added explanations and results help understand the experimental procedures and clarify the temperature characteristics and the durability of metal nanosheet sensors during self-heating.
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