Abstract
Low noise sensors with low power consumption are needed for sensing the bio-magnetic potentials produced by the human body. Compared to their electrical counterparts, bio-magnetic sensors are non-invasive and non-contact. A strain modulated FeCo-Hf/AlScN based sensor with a bandwidth of 3.4 kHz and a magnetic noise spectral density at 1 kHz of 59.5 pT/√Hz before demodulation and 98.5 pT/√Hz after demodulation in an unshielded environment is presented. The footprint of the sensor including flux concentrators is 0.125 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , and the total power consumption of the printed circuit board based readout electronics is 440 mW. A theoretical analysis for scaling of the sensitivity and the noise spectral density of modulated multiferroic sensor systems is presented.
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