Abstract

A practical all-niobium dc superconducting quantum interference device (SQUID) with a niobium spiral input coil has been developed. The SQUID utilizes submicron Josephson junctions. The best intrinsic energy resolution obtained with a 1-nH SQUID is 4×10−32 J/Hz. A 20-turn 1.2-μH input coil is coupled to a 2.3-nH SQUID with an efficiency of 0.5. The energy resolution with respect to the coil is 1×10−30 J/Hz.

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