Abstract
In the development of any type of magnetic field sensor based on magnetic films, special consideration must be given to the magnetic layer component. The presented work investigates the use of scalable flux closing magnetostrictive multilayers for inverse magnetoelectric sensors. In such a type of magnetic field sensor, highly sensitive AC and DC field detection relies on strong excitation of the incorporated magnetic layers by piezoelectrically driven cantilever oscillation at mechanical resonances. The provoked periodic flux change is influenced by the magnetic field to be measured and is picked up by a coil, which generates the measured output. The multilayered inverse magnetoelectric sensor is investigated with regard to linearity, noise behavior, and detection limit of DC and AC signals. A significant advancement for inverse magnetoelectric thin film sensors is demonstrated in this study. Using exchange bias stabilized magnetic multilayers with flux closure structures, detection limits are improved by an order of magnitude to less than 8 pT/Hz1/2 at 10 Hz and 18 pT/Hz1/2 at DC.
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