Abstract
Reduction in the scattering losses of ZrO2, Al2O3, CeO2 and Ta2O5 waveguides fabricated on BK-7 glass substrates using ion-assisted evaporation techniques has been achieved. The lowest losses have been observed for an Al2O3 ion-assisted film using 1200 eV O21. These losses are of the order of 2–5 dB cm−1 and compare with > 15–20 dB cm1 for evaporated guides produced without ion assistance.
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