Abstract
The high-performance silicon optical coupler is one of the significant functional devices, which will be required to enable mass commercialization of silicon photonic integrated circuits (Si-PICs). In this work, we investigated the bending shapes for each device length and have successfully fabricated a very low-loss and broadband 5- $\mu \text{m}$ -beam-spot surface optical coupler based on a lensed-top vertically curved silicon waveguide by adjusting the dose conditions used in the ion implantation process. The fabricated device showed a coupling loss of 2.4 dB, which included a waveguide loss of approximately 0.5 dB and a 0.5-dB-loss bandwidth of more than 220 nm for the transverse electric polarization in the 1.55- $\mu \text{m}$ wavelength band. This coupling device will greatly contribute to the progress in the development of Si-PICs using the coarse wavelength division multiplexing technique.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call