Abstract

Parasitic extraction is an essential tool in the design process of electronic components as it enables to characterize parasitic effects by field simulation and to embed them as lumped parameters in subsequent circuit simulations together with the functional elements of the design. In a recent publication, we introduced a broadband extraction technique that utilizes the finite-element method, which exhibits a higher flexibility with respect to some aspects of device modeling than many classical extraction techniques based on the method of moments. However, the finite-element method applied to Maxwell’s equations in the frequency domain is notorious for exhibiting a low-frequency breakdown, and a reliable solution from low- to high-frequency regime is only possible with an adequate stabilization strategy. We, therefore, show how a state-of-the-art stabilization approach based on a split of the Sobolev space of curl-conforming basis functions is applied to our parasitic extraction method. The stabilization does not only enable an extraction with Maxwell’s equations at arbitrary frequencies but is also seamlessly applied to two quasi-static approximations and the case of perfect electric conductors, which facilitate the extraction in many cases.

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