Abstract
A miniature piezoelectric energy harvester with bimorph configuration and low natural frequency is proposed in this article for vibration harvesting. The vibration energy harvester is fabricated from double-layer lead zirconate titanate (PZT) thick films and titanium (Ti) substrate via a dip-coating process. The high fracture toughness and strength of the Ti substrate were found to be conducive to forming a harvester with low nature frequency. Highly (100) oriented PZT films 1.71 µm in thickness were deposited on both sides of 50 µm-thick Ti substrate to fabricate the harvester. When the harvester was tested under 3 m s−2 vibration acceleration and an optimum load resistor of 47.5 kΩ, the measured resonant frequency was only 24.2 Hz, and the optimal output power was reached 50.9 µW.
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