Abstract
A secondary electron (SE) separator (deflector) is proposed for the energy analysis of low-energy (<50 eV) SEs in a dedicated scanning transmission electron microscope (STEM). Since it is simple and small, it can be built into the STEM sample cartridge without extensive column modification. SE trajectories in the objective lens and the separator were simulated by a numerical method. The preliminary results suggest a 90% or better extraction efficiency for SEs with an initial energy of 0–30 eV. It is expected to be a useful electron-optical component for SE analysis systems.
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