Abstract
In this study, we present a highly responsive room-temperature resistive humidity sensor based on a shellac-derived carbon (SDC) active film deposited on sub-micrometer-sized carbon interdigitated electrodes (cIDEs). This monolithic carbon-based sensor demonstrates an excellent linear relationship with humidity and ohmic contact between the active carbon film and carbon electrodes, which results in low noise and low power consumption (∼1 mW). The active SDC film is synthesized by a single-step thermal process, wherein the temperature is found to control the amount of oxygen functional moieties of the SDC film, thereby providing an efficient means to optimize the sensor response time, recovery time, and sensitivity. This SDC–cIDEs-based humidity sensor exhibits an excellent dynamic range (0%–90% RH), a large dynamic response (50%), and high sensitivity (0.54/% RH). In addition, the two-dimensional feature (thickness ∼10 nm) of the SDC film enables a swift absorption/desorption equilibrium, leading to fast response (∼0.14 s) and recovery (∼1.7 s) under a humidity range of 0%–70% RH. Furthermore, the thin SDC-based sensor exhibited excellent selectivity to humidity from various gases, which in combination with its fast response/recovery promises its application for an instant calibration tool for gas sensors.
Highlights
To cite this article: Shalik Ram Joshi et al 2020 J
We present a novel monolithic carbon-based resistive humidity sensor using a biopolymer-derived thin carbon film coated on carbon interdigitated electrodes, which is capable of room-temperature operation, and exhibits excellent sensitivity, selectivity, and long-term reliability
Morphology of the humidity sensor based on the biopolymerderived carbon film.—Figure 2 shows the scanning electron microscope (SEM) images of the thin carbon film based humidity sensors prepared by integrating Shellac derived carbon (SDC) films on sub-micrometer-sized carbon interdigitated electrodes (cIDEs)
Summary
To cite this article: Shalik Ram Joshi et al 2020 J. Soc. 167 147511 View the article online for updates and enhancements. This content was downloaded from IP address 182.161.141.13 on 03/12/2020 at 07:36. Shalik Ram Joshi,= Beomsang Kim,= Shin-Kwan Kim, Gun-Ho Kim,z Wonho Song, Kibog Park, and Heungjoo Shinz. Manuscript submitted September 18, 2020; revised manuscript received October 20, 2020. This paper is part of the JES Focus Issue on IMCS 2020
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