Abstract
In this study, the gas sensing properties of SnO2 and Zn0.50Sn0.50O samples produced by Succession Ionic Layer Adsorption and Reaction (SILAR) method with different SILAR cycles against NO gas were investigated. Electrical characterization of the produced sample at different temperatures (35 °C-135 °C) and different gas concentrations (50 ppb-25 ppm) were performed. The working temperature was found at 105 °C. The sensors were proved to have acceptable responses towards 50 ppb NO gas. Zn0.50Sn0.50O sensor exhibited improved sensing performance at working temperature of 105 °C compared to SnO2 sensor.. The ,responses of SnO2 sensors for the 50 ppb NO gas concentration, sensitivities of 1.74%, 2.15% and 3.37% were obtained for 20, 30 and 40 cycles, respectively. On the other hand, the,responses of Zn0.50Sn0.50O sensors for the 50 ppb NO gas concentration sensitivities of 3.01%, 3.74% and 4.16% were obtained for 20, 30 and 40 cycles, respectively. The measurement results showed that the sensitivity of the sensors changed depending on the doping and producing cycles.
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