Abstract
A fluorinated methacryl hybrid material, with low surface tension, was used as animprinting material for easy de-moulding in a UV-based nano-imprint process.Specifically, a method to measure the adhesive force between the poly(dimethylsiloxane)(PDMS) mould and the imprinting material, using the force–distance curve ofPDMS, was suggested to represent the de-mouldability of the PDMS mould ina UV-based nano-imprint process. The fluorinated methacryl hybrid materialexhibited a low adhesive force to PDMS, as well as low surface tension, and could benano-imprinted without using an anti-sticking treatment on the PDMS mould.
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