Longitudinal rf discharge in Xe/Cl2 mixtures

Abstract

Results are presented from the studies of the electrical and emission characteristics of the low-temperature plasma of a longitudinal rf (f 0=1.76 MHz) discharge in Xe/Cl2 mixtures at pressures of 100–800 Pa. The discharge was ignited in a cylindrical quartz tube with an inner diameter of 1.4 cm and interelectrode distance of 3.0 cm. The discharge emission within the spectral range of 190–670 nm is studied. The dynamics of the discharge current and discharge emission at different pressures and compositions of a Xe/Cl2 mixture are investigated. It is shown that a discharge in a Xe/Cl2 mixture acts as a wideband excimer-halogen lamp with a cylindrical output aperture emitting in the spectral range of 220–320 nm. The broad plasma emission spectrum is formed due to the overlap of the XeCl(D, B-X; B, C-A) bands that are broadened at low working-gas pressures. The composition of the working mixture is optimized to achieve the maximum power of the wideband UV plasma emission. Longitudinal rf discharges in low-pressure Xe/Cl2 mixtures are of interest for developing small-size wideband (Δλ=220–450 nm) cylindrical-aperture lamps, whose efficiency can, on average, exceed the efficiency of conventional hydrogen lamps by more than one order of magnitude.