Abstract
In order to build a motion system with high resolution, fast response, and long travel range in a probe station, a linear ultrasonic motor was investigated as an alternative to the electromagnetic counterpart in a servo system. This work focused on a longitudinal composite-mode linear ultrasonic motor for the motion servo system in a probe station. The motor was designed based on the required specifications. A finite element model was built to analyze the dynamic response of the stator. The influence of the structural parameters on the dynamic performances, i.e., sensitivity parameters, was calculated to analyze the stability of the structure. Based on these analytical works, a prototype of the stator was developed and mode testing was conducted. The experimental results showed that the proposed design was able to achieve respectable performance: Despite the dual-mode design, the frequency difference between the two working modes was minimized to 608 Hz; and the prototype could operate stably under 55.4 kHz, providing a 0.5 N load with 980 mm/s speed.
Highlights
A probe station can be used to test the electrical performance of dies on a wafer by physically connecting a probe and a welding panel of a die on a wafer
With the increasing die density and size of the wafer, precision probe stations with high speed and long travel length become high in demand [3]
The motion servo system aligns every die on the wafer with the testing probe with a high frequency
Summary
A probe station can be used to test the electrical performance of dies on a wafer by physically connecting a probe and a welding panel of a die on a wafer. (30.48 cm) wafers, in which the density of dies in one line is more than 5 pcs per cm and the width of the welding panel is less than 10 micrometers In this situation, the travel range of the motor should be more than 300 mm and the position precision under fast testing intervals should be less. When two working modes are the same, the trajectory of the contact tip remains elliptical regardless of the assembly conditions This is good for the consistency of performance along different motion directions [16,25,26,27]. The assembly conditions may affect the frequency consistency of two working modes [29,30] Addressing this challenge is the motivation of the work presented in this paper.
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