Abstract

To simplify the design of the linear ultrasonic motor (LUSM) and improve its output performance, a method of modal decoupling for LUSMs is proposed in this paper. The specific embodiment of this method is decoupling of the traditional LUSM stator's complex vibration into two simple vibrations, with each vibration implemented by one vibrator. Because the two vibrators are designed independently, their frequencies can be tuned independently and frequency consistency is easy to achieve. Thus, the method can simplify the design of the LUSM. Based on this method, a prototype modal- independent LUSM is designed and fabricated. The motor reaches its maximum thrust force of 47 N, maximum unloaded speed of 0.43 m/s, and maximum power of 7.85 W at applied voltage of 200 Vpp. The motor's structure is then optimized by controlling the difference between the two vibrators' resonance frequencies to reach larger output speed, thrust, and power. The optimized results show that when the frequency difference is 73 Hz, the output force, speed, and power reach their maximum values. At the input voltage of 200 Vpp, the motor reaches its maximum thrust force of 64.2 N, maximum unloaded speed of 0.76 m/s, maximum power of 17.4 W, maximum thrust-weight ratio of 23.7, and maximum efficiency of 39.6%.

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