Abstract
Long line-shaped microwave plasma is generated employing a narrow rectangular waveguide. The wavelength of a microwave in a waveguide increases in accordance with the narrowing of the width of the waveguide. A narrow and flat rectangular waveguide is produced with internal dimensions of 500 mm length, 62 mm width and 5 mm height. The waveguide is connected to a TE10 mode rectangular waveguide (WST-AD standard). Two types of line-shaped plasmas are generated; one being a cavity type and the other a slit type. The cavity type line-shaped plasma has a quartz tube in the waveguide as a discharge tube and helium gas is supplied into the quartz tube through orifices of the waveguide. The slit type line-shaped plasma has a slit on its side. A quartz tube as a discharge tube is set beside the slit and helium gas is supplied into it. Electric field intensity and optical emission intensity are then measured. Uniform line-shaped plasmas are generated by varying the width of the waveguide and the microwave power in both types of line-shaped plasmas.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call