Abstract
This paper presents a novel, sliding, A-shaped microrobot with nanometric resolution for precision positioning applications. The microrobot is actuated near its natural frequency using a piezoelectric stack actuator to produce translational motion. The dynamic modeling of the mechanism is based on the assumptions of the linear piezoelectric behavior and the Coulomb friction model. Using this model the required condition for generating net motion is found. The suitability of three simple, friction-based locomotion modes for implementation on the proposed device is addressed. Influences of some important configuration parameters on the behavior of the microrobot, based on defined criteria, are investigated. Even with non-optimal configurations, simulations show a velocity of 1mm/s, a motion resolution of 180nm, and a power consumption of 1.5mW. Comparisons made with other microrobots of the same locomotion modes indicate good improvements in all criteria.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
