Abstract
In this paper, a novel, A-shaped microrobot with nanometric resolution for precision positioning applications is addressed. The locomotion concept of the mechanism is founded on the “friction drive principle”. To achieve the translational motion, a stack piezoelectric actuates the microrobot near its natural frequency. The dynamic modeling of the mechanism is based on the assumptions of linear behavior of piezo stack actuator and Coulomb friction model at contact points. The suitability of three simple, friction-based locomotion modes for implementation on the proposed device is presented. Influences of different friction coefficients on the behavior of the microrobot, with respect to defined criteria, are invoked. Simulations show a velocity of 1 mm/s, a motion resolution of 180 nm, and a power consumption of 1.5 mW. Comparisons made with other microrobots of the same locomotion principle indicate good improvements in all criteria.
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