Location-resolvable optical monitored growth of multiple-wavelength vertical-cavity laser arrays

Abstract

Multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a location-resolvable in situ optical calibration method and a patterned-substrate growth technique in a molecular beam epitaxy (MBE) system. The high and low wavelength limits are achieved within 0.28% accuracy and with a 2.66 A wavelength standard deviation from 4 × 35 arrays.