Location-Optoelectronic Property Correlation in ZnO:Al Thin Film by RF Magnetron Sputtering and Its Photovoltaic Application.

Fang-I Lai,Shou-Yi Kuo,Jui-Fu Yang,Yu-Chao Hsu

doi:10.3390/ma14216313

Fang-I Lai, Shou-Yi Kuo + Show 2 more

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https://doi.org/10.3390/ma14216313

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Abstract

In this study, a radio-frequency magnetron sputter system was used to deposit Al2O3 doped ZnO (AZO) thin films at room temperature, and the soda lime glass (SLG) substrates were placed at different zones relative to the center of the sample holder under the target. The samples were then analyzed using an X-ray diffractometer, Hall-effect measurement system, UV-visible spectrophotometer, and X-ray photoelectron spectroscopy. It was found that the electrical, structural, and optical properties of AZO films strongly depend on the target racetrack. The AZO thin film grown at a location outside the racetrack not only has the most suitable figure of merit for transparent conductive films, but also retains the least residual stress, which makes it the most suitable candidate for use as a CZTSe transparent conductive layer. When applied to CZTSe solar cells, the photoelectric efficiency is 3.56%.

Highlights

Cu2 ZnSnSe4 (CZTSe) is a thin-film solar cell material, which has attracted much attention due to its high material absorption coefficient, abundant raw materials, and similarity in structure to Cu(In,Ga)Se2 solar cell components [1,2]
The standard component structure of CZTSe thin-film solar cells consists of a transparent conductive layer (TCL), window, buffer, absorber, back contact, and substrate; the TCL is a key component
This study focuses on the RF magnetron sputtering method for the deposition of Al2O3 doped Zinc oxide (ZnO) (AZO) films in a low temperature environment and discusses the relationship between the substrate placed at different locations and the target etching area

Summary

Introduction

Cu2 ZnSnSe4 (CZTSe) is a thin-film solar cell material, which has attracted much attention due to its high material absorption coefficient, abundant raw materials, and similarity in structure to Cu(In,Ga)Se2 solar cell components [1,2]. Hydrazine is toxic, prone to explosion, and requires expensive equipment It is impractical for use in mass production. During the past few years, CZTSe thin-film solar cells have demonstrated good performance in vacuum processes. The 11.4% efficiency of the sputtering-post-selenization method [4] and the 11.6% efficiency of the co-evaporation method [3] have proven to be the highest among the currently available vacuum methods, where the sputteringpost-selenization method has received the most attention. This method offers uniformity, flatness, a large area, and rapid mass production capabilities. Many types of TCL are available [9,10,11], and In2 O3 :Sn (ITO)

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