Abstract
ZnO:Al thin films were prepared by Electrostatic spray deposition on soda lime glass substrate. The role of substrate temperatures (300, 350, 400 and 450 O C) on the Electrical and Optical properties of the films were investigated.The electrical properties of the films were strongly dependent on the substrate temperature. ZnO:Al thin film has lowest resistivity (1.8 × 10Ωm ) and highest conductivity of 5.61 × 10(Ωm)at substrate temperature of 400 0 C. Also the optical transmittance of ZnO:Al thin films were obviously influenced by the substrate temperature. All films exhibit transmittance greater than 50% in the visible region with the highest value of 84% at 400 0 C. More significantly, Aluminum doping leads to an evident widening of optical band gap from3.429 to 4.160 eV; and the increase is found to depend on substrate temperature.
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