Abstract
PZT (PbZr/sub x/Ti/sub 1-x/O/sub 3/) thin films have been locally grown by means of sol-gel deposition and local anneals on microhotplate. The microhotplate was based on a tantalum silicide filament (Ta/sub 5/Si/sub 3/) formed on stress compensated SiN/SiO/sub 2/ membrane. On this filament, a passivation layer of SiO/sub 2/, a layer of Ti/TiO/sub 2/ and a bottom electrode of Pt were deposited. Due to the low heat conductivity of the membrane, crystallization of the PZT film occurs exactly on the resistor filament. The formation of crystalline, i.e. perovskite PZT was verified by means of X-ray diffraction. A random PZT texture has been observed.
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