LOCAL GROWTH OF SOL-GEL FILMS BY MEANS OF MICROHOTPLATES

Abstract

International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 563-568 (2003) Poster PapersNo AccessLOCAL GROWTH OF SOL-GEL FILMS BY MEANS OF MICROHOTPLATESF. CALAME, J. BABOROWSKI, N. LEDERMANN, and P. MURALTF. CALAMECeramics Laboratory, Engineering Faculty, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland Search for more papers by this author , J. BABOROWSKICeramics Laboratory, Engineering Faculty, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland Search for more papers by this author , N. LEDERMANNCeramics Laboratory, Engineering Faculty, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland Search for more papers by this author , and P. MURALTCeramics Laboratory, Engineering Faculty, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland Search for more papers by this author https://doi.org/10.1142/S1465876303001769Cited by:2 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractPZT(PbZrxTi1-xO3) thin films have been locally grown by means of sol-gel deposition and local anneals on microhotplate. The microhotplate was based on a tantalum silicide filament (Ta5Si3) formed on stress compensated SiN/SiO2 membrane. On this filament, a passivation layer of SiO2, a layer of Ti/TiO2 and a bottom electrode of Pt were deposited. Due to the low heat conductivity of the membrane, crystallization of the PZT film occurs exactly on the resistor filament. The formation of crystalline, i.e. perovskite PZT was verified by means of X-ray diffraction. A random PZT texture has been observed.Keywords:Hotplatestantalum silicidelocal growthPZT References A. Pollien, J. Baborowski, N. Ledermann and P. Muralt, "New material for thin film filament of micromachined hot-plate", Proceedings of the 11th conference on solid-state sensors and actuators, Transducers'2001, Munich, pp. 848-851 (2001) . Google ScholarM. Ehmannet al., Proceedings of MEMS'01 (2001) pp. 147–150. Google Scholar T.B. Massalski, "Binary alloy phase diagrams", 2nd ed Vol. 1-3, 1990, ASM International . Google ScholarM.-A. Nicolet, Mat. Res. Soc. Symp. Proc. 40, 317 (1985). Crossref, Google ScholarS. P. Muraka, J. Vac. Sci. 17(4), 775 (1980). Crossref, Google ScholarK. Brookset al., J. Mater. Res. 9(10), 2540 (1994). Crossref, Google Scholar FiguresReferencesRelatedDetailsCited By 2Design of a Flexible Stethoscope Sensor Skin Based on MEMS TechnologyHonghai Zhang, Maozhou Meng, Xiayun Shu and Sheng Liu1 Aug 2006Microfabrication of Piezoelectric MEMSJ. Baborowski1 Jan 2005 Recommended Vol. 04, No. 03 Metrics History KeywordsHotplatestantalum silicidelocal growthPZTPDF download