Abstract

Introduction of new semiconductor technology to the market place depends on how quickly advanced research and development organizations can provide viable products. A methodology is described and examples given that reduce the development time associated with leading edge lithography systems. An interactive development loop focusing on improvement of dimensional control and depth of focus is discussed. Techniques to improve the areas of design, data collection and analysis are presented.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.