Abstract

In order to develop the building blocks for future biosensing and spintronic applications, an engraving technique using electron beam lithography is employed in order to develop nanomagnetic pre-patterned structures with logic potential. The paper describes the realization and morphological and magnetic characterization of potentially logic-conditioned substrates, a building block to be further used as an integration platform upon which nanodevices, such as magnetic wires, or various geometrical shapes, circles, triangles, can be considered as pre-requisite for full integration into logic devices. As a proof of concept, regular arrays of FePt circles or magnetic dots were devised and structural characterization by X-ray diffraction and transmission electron microscopy proved the occurrence of the tetragonal L10 phase. Moreover, the magnetic characterization provided more insight into the potential of such arrays of magnetic devices as the hysteresis provided good values of magnetic coercivity, remanent and saturation magnetization. These findings show good potential for developing regular arrays of uniformly shaped magnetic entities with encouraging magnetic performances in view of potential applications in various applications.

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