Abstract

We have studied the coercive force of fine magnetic CoPt dot enhanced by nanometer-sizing of the dot. The 39-to 106-nm-sized CoPt magnetic dot arrays were formed by30-keV-electron beam (EB) drawing with thin calixarene resist and 200-eV-Ar ion milling. Using the fine magnetic dot arrays, we measured coercive forces of the dot by x-ray magnetic circular dichroism (XMCD) with an energy of 11.56 keV, which corresponds to an energy edge of Pt-L3. It is experimentally demonstrated that a coercive force of the nanometer-sized magnetic column increased as the dot diameter decreased. Keywords: Coercive force, nanomagnetic column, XMCD, magnetic storage, EB lithography

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