Abstract
A process for batch fabricating and mounting polymer (SU-8, EPON) tips on a mass-produced quartz tuning fork wafer is proposed in this paper. In order to add a sharp tip to a side wall of such tuning forks, three unconventional procedures were combined with an optical lithography step: (1) gluing the sample and mask together; (2) coating a photosensitive polymer directly on this ensemble; and (3) inclining the mask during exposure. Sharp SU-8 tips with a 170 nm radius of curvature were obtained. These tuning fork sensors were successfully applied in scanning force microscope imaging in the dynamic mode.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
