Abstract
. Results obtained in the analysis of single layer and multilayered carbon stacks produced by PLD at low temperature will be presented. The mechanical properties of carbon single layers deposited at various laser pulse fluences, like hardness and elasticity, were determined by means of nano indentation measurements. It will be shown that a wide variety of mechanical properties can easily be adjusted by adapting the process parameters.
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Schedule a callMore From: IOP Conference Series: Materials Science and Engineering
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