Abstract
A novel niobium source, niobium tetrakis(isopropoxide) 2,2,6,6-tetramethyl-3,5-heptanedionate, Nb(O-i-Pr)4(thd), was investigated for Nb doping of ferroelectric Pb(Zr,Ti)O3 (PZT) thin films by metal−organic chemical vapor deposition (MOCVD). Thermal analysis revealed that this compound exhibited useful volatility and thermal stability. Nuclear magnetic resonance (NMR) studies of this precursor in solution exhibited its chemical compatibility and stability with the Pb, Zr, and Ti co-reactants. Single-phase perovskite Nb-doped PZT films were successfully grown by liquid delivery MOCVD with good ferroelectric properties.
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