Linear calibration procedure for the phase-to-height relationship in phase measurement profilometry

Abstract

Calibration of the relationship between height and phase is of uttermost importance to perform accurate 3D measurements in phase measurement profilometry. This work reports a different approach to this problem by first looking at the analytical expression for this relationship and determining the regime spanned by the fringe analysis method. The conclusions thus ascertained, amply justify confronting the analytical expression with a simple normalization procedure of the experimental data, with a remarkable matching between both results. In light of this, a linear calibration procedure with just one plane is proposed and verified experimentally.