Abstract
Frequency response behavior of microcantilever is analytically and experimentally investigated in amplitude modulation Atomic Force Microscopy (AFM). AFM microcantilever probe is modeled as a continuous beam, and tip-sample interaction force is considered to include both attractive and repulsive force regimes. The developed model is compared with the linear lumped-parameters model that has been extensively used in the literature so far. Experimental measurements are also provided for the frequency response of a typical microcantilever-sample system to demonstrate the advantages of the developed model over the linear formulation. The results indicate that the nonlinear continuous model is more accurate, particularly in the estimation of the saturated amplitude value and frequency zone in which the tip-sample contact happens.
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