Abstract
This work proposes a generic methodology to evaluate the feasibility of designing a MEMS resonator-based Pierce oscillator according to any given CMOS technology with the constraint of using only one single active transistor. This approach, applied to the case of a capacitive doubly-clamped beam resonator used in its in-plane fundamental vibration mode, is validated by simulations using a 0.13 μm CMOS technology.
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