Abstract
Synchrotron-based proximity x-ray lithography (PXL) has been developed for more than 20 years. The lightsource for high-throughput PXL manufacturing is a synchrotron radiation (SR) ring with multiple x-ray steppers. From the late 1980 's to early 1990 's, many compact SR rings for PXL adopted superconducting magnetsfor achieving their compactness were built in the USA and Japan. The Association of Super-Advanced Electronics Technologies (ASET) was established in Japan in 1996 and ASET had several programs to promote PXL in NTT at Atsugi-shi. An e-beam X-ray mask writer “EB-X3” was developed by NTT and ASET fabricated PXL masks for 4Gbit DRAMs by the writer with 100nm design rules. Sumitomo Heavy Industries (SHI) has developed a new normal-conducting compact SR ring “AURORA-2S” with a beam current 500mA usinga novel idea to increase the field strength of normal-conducting magnets to 2.7 Tesla. In this paper, SR rings for PXL are introduced.
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