Abstract
Abstract The development of micro-scale mechanical systems has been moving rapidly, allowing an opportunity to the semiconductor detectors to have ever more power located on the active region. Miniaturization associated with micro-channel technologies allows the design of micro-system structures that are able to cool silicon pixel detectors with power of the order of some W/cm 2 with thickness less than 0.3% of radiation length. We present the design and thermo-hydraulic test results for low material budget support and cooling obtained through forced liquid convection in micro-channels, developed for the innermost layer (Layer 0) of SuperB silicon vertex tracker .
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