Abstract
This paper was designed to fabricate the micro-spur gear by the LIGA and hybrid powder extrusion process. It is important to manufacture a micro-die with a high aspect ratio and determine appropriate extrusion conditions for a microforming. Ni has been used to fabricate micro-dies. LIGA process was capable to produce micro-extrusion dies with close tolerance, longer bearing length and adequate surface quality. Superplastic Al-78Zn powders have the great advantage in achieving deformation under low stresses and exhibiting good micro-formability with average strain rate raging from <TEX>$10^{-3}$</TEX> to <TEX>$10^{-2} s^{-1}$</TEX> and constant temperature ranging from 503 to 563K. Al-78Zn powders were compacted into a cylindrical shape (<TEX>$\Phi3\times$</TEX>h10mm) under compressive force of 10kN and, subsequently, the compacted powders were extruded by the hybrid powder extrusion process controlling of the temperature holing time for a improvement on formability of Al-22Zn powder. Micro-extrusion has succeeded in forming micro-gear shafts.
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