Abstract

Micro spur gears were fabricated using the LIGA process and step powder extrusion without sintering. It is important to manufacture micro dies with high aspect ratios and determine the appropriate extrusion conditions for the micro-forming process. Micro-extrusion dies with close tolerance and long bearing length were produced by the LIGA process. Superplastic Zn-22wt%Al powders can deform under low stresses and exhibit a good micro-formability (average strain rate: 10−3s−1; constant temperature: 250°C). These powders were compacted to a cylinder (diameter: 3 mm; height: 10 mm) under 10kN compressive force, and sintered at 350°C for two hours. Micro spur gear shafts were not produced upon extrusion because of the high working pressure on the die surface. For the reduction of the forming load, step powder extrusion was carried out on the compacted powder without a sintering process, but controlling the temperature dwelling period. This process has succeeded in fabricating micro-gear shafts.

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