Abstract
Amorphous LixSi (x= 0.4) thin films were produced by reactive ion-beam co-sputtering for use as anode materials in Li-ion batteries.
Highlights
Amorphous lithium–silicon compounds are promising materials in order to improve pure silicon as a high-capacity anode material in lithium-ion batteries
We demonstrated that it is possible to produce amorphous LixSi (x z 0.4) thin films by reactive ion-beam cosputtering of a segmented solid state target composed of metallic lithium and elemental silicon
In the present paper we describe the preparation of Li–Si thin lms, which were produced by reactive co-sputtering of segmented elemental lithium and silicon targets
Summary
Amorphous lithium–silicon compounds are promising materials in order to improve pure silicon as a high-capacity anode material in lithium-ion batteries. We demonstrated that it is possible to produce amorphous LixSi (x z 0.4) thin films by reactive ion-beam cosputtering of a segmented solid state target composed of metallic lithium and elemental silicon.
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