Abstract
In this paper we present effective imprinting technique for fabrication of photonic crystal (PhC) structures on surface of thin polydimethylsiloxane (PDMS) membranes. We prepared two-dimensional (2D) PhC surface relief structures of period 650 nm in thin PDMS membranes with depth up to 140 nm. The patterned PDMS membranes were placed on LED chip. The diffraction effect of PhC PDMS membranes with 2D square and triangular symmetry was then analyzed by measurements of far-field radiation pattern.
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